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No P/N Description
1 0090-07478 FES Server KDASG03
2 0190-43226 RTC ATOM 1.66GHZ, 1GB RAM, 160GB HDD,3U
3 0100-02492 PCB ASSEMBLY, GAS PANEL CONTROLLER BACKPLANE
4 0090-07741 FES Server KDAPN01
5 0090-06269 ASSEMBLY, PCB, MAINFRAME INTERFACE, C-AP
6 0190-27952 DIGI HUB 16 PORT
7 E11108270 INTERFACE ASSY??PNEUMATIC ;INTERFACE
8 E11049810 Exhaust conductivity monitor
9 E11095541 Corrector interface
10 E15006160 Beam pneumatic Interface A4 board
11 E15013210 LL wafer walk out sensor PCB
12 0190-62355 CONTROLLER, MB340G4 WRLD-Z W/ RS-232, FW |